Isn’t this only possible because ASML has licensed EUV technology from DARPA, a US research program? Plus ASML has a lot of US based engineering employees.
There is no relation to DARPA at all.
ASML licensed from the DOE, and this license is from 1997, almost 30 years ago. Then, in 2001, ASML bought a US silicon company that had the EUV patents. That was 25 years ago. Those patents expired already.